Substrate-bias
常见例句
- The results showed that diffusion coefficient and diffusive distance increased w ith raising of negative substrate bias.
结果表明扩散系数和扩散距离都随着负衬底偏压的增大而增大。 - In the paper, the enhancing process of diamond nucleation by negative substrate bias in hot filament CVD system was analyzed.
对利用热灯丝CVD沉积金刚石膜时负衬底偏压增强金刚石的核化过程进行了分析。 - Amorphous diamond(a-D) films deposited by filtered cathodic vacuum arc(FCVA) technology with different substrate bias were investigated.
采用过滤阴极真空电弧技术,通过施加不同衬底偏压制备了非晶金刚石薄膜。 - In this paper, the nucleation process of diamond by filament CVD was analyzed, and enhanced flux of ions by negative substrate bias was investigated in theory.
摘要木文对热灯丝CVD沉积金刚石膜的核化过程进行了分析,从理论上研究了负衬底偏压增强活性离子的流量。 - In this paper,the nucleation process of diamond by filament CVD was analyzed,and enhanced flux of ions by negative substrate bias was investigated in theory.
本文对热灯丝CVD沉积金刚石膜的核化过程进行了分析,从理论上研究了负衬底偏压增强活性离子的流量. - Titanium nitride films were deposited on silicon(100) substrate at room temperature with various substrate bias voltages (corresponding to various impact energy) by energetic cluster impact (ECI).
在室温下,以硅(100)为衬底,在不同的衬底偏压(即团簇不同碰撞能量)的条件下,用荷能团簇碰撞沉积方法制备了TiN薄膜。 返回 Substrate-bias